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HOMOGENEOUS REACTIONS OF HYDROCARBONS, SILANE, AND CHLOROSILANES IN RADIOFREQUENCY PLASMAS AT LOW PRESSURES.
Year:
1984
Source of publication :
NASA Technical Memorandum
Authors :
Rosenthal, Ionel
;
.
Volume :
Co-Authors:
Avni, Reuven
Carmi, Uzi
Inspektor, Aron
Rosenthal, Ionel
Facilitators :
From page:
To page:
(
Total pages:
1
)
Abstract:
The ion-molecule and radical-molecule mechanisms are responsible for the dissociation of hydrocarbon, silane, and chlorosilane monomers and the formation of polymerized species, respectively, in an rf plasma discharge. In a plasma containing a mixture of monomer and argon the rate-determining step for both dissociation and polymerization is governed by an ion-molecule type of interaction. Adding hydrogen or ammonia to the monomer-argon mixture transforms the rate-determining step from an ion-molecule interaction to a radical-molecule interaction for both monomer dissociation and polymerization.
Note:
Related Files :
Hydrocarbons
MONOMER DISSOCIATION
PLASMAS
SILANE
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More details
DOI :
Article number:
Affiliations:
Database:
Scopus
Publication Type:
Language:
English
Editors' remarks:
ID:
19403
Last updated date:
02/03/2022 17:27
Creation date:
16/04/2018 23:28
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Scientific Publication
HOMOGENEOUS REACTIONS OF HYDROCARBONS, SILANE, AND CHLOROSILANES IN RADIOFREQUENCY PLASMAS AT LOW PRESSURES.
Avni, Reuven
Carmi, Uzi
Inspektor, Aron
Rosenthal, Ionel
HOMOGENEOUS REACTIONS OF HYDROCARBONS, SILANE, AND CHLOROSILANES IN RADIOFREQUENCY PLASMAS AT LOW PRESSURES.
The ion-molecule and radical-molecule mechanisms are responsible for the dissociation of hydrocarbon, silane, and chlorosilane monomers and the formation of polymerized species, respectively, in an rf plasma discharge. In a plasma containing a mixture of monomer and argon the rate-determining step for both dissociation and polymerization is governed by an ion-molecule type of interaction. Adding hydrogen or ammonia to the monomer-argon mixture transforms the rate-determining step from an ion-molecule interaction to a radical-molecule interaction for both monomer dissociation and polymerization.
Scientific Publication
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